Selective growth and texturing of VO2(B) thin films for high-temperature microbolometers
Tae-Hyeon Kil, Hyung‐Jin Choi, Gwangyeob Lee, Byeong-Hyeon Lee, Soo Young Jung, Ruiguang Ning, Chan Park, Sung Ok Won, Hye Jung Chang, Won Jun Choi, Seung‐Hyub Baek
Topics & Concepts
Materials scienceThin filmAmorphous solidThermal stabilityTemperature coefficientSputteringLayer (electronics)Phase (matter)NanotechnologyOptoelectronicsComposite materialChemical engineeringCrystallographyOrganic chemistryChemistryEngineeringTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and SensorsElectronic and Structural Properties of Oxides