β-Ga2O3 MOSFETs on the Si substrate fabricated by the ion-cutting process
Yibo Wang, Wenhui Xu, Tiangui You, Fengwen Mu, Haodong Hu, Yan Liu, Hao Huang, Tadatomo Suga, Genquan Han, Xin Ou, Yue Hao
Topics & Concepts
TransistorThreshold voltageMaterials scienceWaferOptoelectronicsSubstrate (aquarium)IonMOSFETVoltageElectrical engineeringChemistryEngineeringGeologyOrganic chemistryOceanographyGa2O3 and related materialsZnO doping and propertiesElectronic and Structural Properties of Oxides