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Temperature dependence of β-Ga2O3 heteroepitaxy on c-plane sapphire using low pressure chemical vapor deposition

Gavax Joshi, Yogesh Singh Chauhan, Amit Verma

2021Journal of Alloys and Compounds48 citationsDOI

Topics & Concepts

Materials scienceCrystallinityChemical vapor depositionThin filmAmorphous solidBand gapSapphireEpitaxyAnalytical Chemistry (journal)Substrate (aquarium)OptoelectronicsOpticsNanotechnologyChemistryCrystallographyComposite materialLaserLayer (electronics)OceanographyGeologyPhysicsChromatographyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques
Temperature dependence of β-Ga2O3 heteroepitaxy on c-plane sapphire using low pressure chemical vapor deposition | Litcius