Deposition and mechanical properties of δ-TaNx films with different stoichiometry by DC magnetron sputtering
Hang Li, Jianliang Li, Chengqi Yan, Jiewen Huang, Jian Kong, Qiujie Wu, Yan Shi, Dangsheng Xiong
Topics & Concepts
Materials scienceTribometerComposite materialSputter depositionHigh-resolution transmission electron microscopyStoichiometryElastic modulusX-ray photoelectron spectroscopyFracture toughnessMicrostructureIndentation hardnessCavity magnetronRaman spectroscopyThin filmTribologySputteringChemical engineeringNanotechnologyTransmission electron microscopyOpticsChemistryPhysicsOrganic chemistryEngineeringMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced materials and composites