Design and fabrication of an InGaAs focal plane array integrated with linear-array polarization grating
Duo Sun, Bo Feng, Bo Yang, Tao Li, Xiumei Shao, Xue Li, Yifang Chen
Abstract
Polarization imaging plays a crucial role in modern photonic applications such as remote sensing, material classification, and reconnaissance. A novel InGaAs focal plane array integrated with linear-array polarization grating is proposed and fabricated to meet the practical needs of near-infrared polarization imaging. In order to accurately evaluate the polarization performance of a fabricated detector, the improved test system is used to measure the transmittance and extinction ratio (ER). The results show that the detectivity reaches <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mn>1</mml:mn> </mml:mrow> <mml:mo>.</mml:mo> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mn>06</mml:mn> </mml:mrow> <mml:mspace width="thickmathspace"/> <mml:mo>×</mml:mo> <mml:mspace width="thickmathspace"/> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:msup> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mn>10</mml:mn> </mml:mrow> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mn>12</mml:mn> </mml:mrow> </mml:msup> </mml:mrow> <mml:mspace width="thickmathspace"/> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mi mathvariant="normal">c</mml:mi> <mml:mi mathvariant="normal">m</mml:mi> </mml:mrow> <mml:mo>⋅</mml:mo> <mml:msup> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mi mathvariant="normal">H</mml:mi> <mml:mi mathvariant="normal">z</mml:mi> </mml:mrow> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mn>1</mml:mn> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mo>/</mml:mo> </mml:mrow> <mml:mn>2</mml:mn> </mml:mrow> </mml:msup> </mml:mrow> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mo>/</mml:mo> </mml:mrow> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mi mathvariant="normal">W</mml:mi> </mml:mrow> </mml:math> , and the operable pixel factor is more than 99.8%. The transmittance of more than 55% and the ER of greater than 21:1 are realized, which indicates that the fabricated detector has excellent capability for near-infrared polarization imaging.