Surface topography affects the nanoindentation data
Tomáš Plichta, Radim Zahradníček, Vladimír Čech
Topics & Concepts
NanoindentationMaterials scienceComposite materialIndentationWaferThin filmSurface roughnessSiliconElastic modulusAmorphous solidCrystallographyNanotechnologyMetallurgyChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications