Aluminum oxide nucleation in the early stages of atomic layer deposition on epitaxial graphene
Emanuela Schilirò, Raffaella Lo Nigro, Salvatore Ethan Panasci, F. M. Gelardi, S. Agnello, Rositsa Yakimova, Fabrizio Roccaforte, Filippo Giannazzo
Topics & Concepts
NucleationGrapheneMaterials scienceRaman spectroscopyAtomic layer depositionCoalescence (physics)EpitaxySiliconOxideSilicon carbideMonolayerLayer (electronics)NanotechnologyChemical engineeringOptoelectronicsComposite materialChemistryMetallurgyOpticsOrganic chemistryEngineeringPhysicsAstrobiologyGraphene research and applicationsSemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit Design