ZrCuAlNi thin film metallic glass grown by high power impulse and direct current magnetron sputtering
Niklas Bönninghoff, Wahyu Diyatmika, Jinn P. Chu, Stanislav Mráz, Jochen M. Schneider, Chien‐Liang Lin, Fredrik Eriksson, Grzegorz Greczyński
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceSputter depositionSputteringThin filmMicrostructurePulsed DCCavity magnetronAnalytical Chemistry (journal)OptoelectronicsComposite materialNanotechnologyChemistryChromatographyMetallic Glasses and Amorphous AlloysHigh-Temperature Coating BehaviorsHigh Entropy Alloys Studies