Structured light for ultrafast laser micro- and nanoprocessing
Daniel Flamm, Daniel G. Grossmann, Marc Sailer, Myriam Kaiser, Felix Zimmermann, Keyou Chen, Michael Jenne, Jonas Kleiner, Julian Hellstern, Christoph Tillkorn, Dirk H. Sutter, Malte Kumkar
Abstract
The industrial maturity of ultrashort pulsed lasers has triggered the development of a plethora of material processing strategies. Recently, the combination of these remarkable temporal pulse properties with advanced structured light concepts has led to breakthroughs in the development of laser application methods, which will now gradually reach industrial environments. We review the efficient generation of customized focus distributions from the near-infrared down to the deep ultraviolet, e.g., based on nondiffracting beams and three-dimensional-beam splitters, and demonstrate their impact for micro- and nanomachining of a wide range of materials. In the beam shaping concepts presented, special attention was paid to suitability for both high energies and high powers.