Changes in the chemical state of metallic Cr during deposition on a polyimide substrate: Full soft XPS and ToF-SIMS depth profiles
Yugo Kubo, Yuichi Sonohara, Shigeaki Uemura
Topics & Concepts
X-ray photoelectron spectroscopySputteringAnalytical Chemistry (journal)Secondary ion mass spectrometrySubstrate (aquarium)Materials scienceChemical stateSputter depositionDeposition (geology)Thin filmChemistryMass spectrometryNanotechnologyChemical engineeringGeologySedimentOceanographyEngineeringPaleontologyChromatographyBiologyIon-surface interactions and analysisSemiconductor materials and devicesIntegrated Circuits and Semiconductor Failure Analysis