Ferroelectric ZrO2 ultrathin films on silicon for metal-ferroelectric-semiconductor capacitors and transistors
Yu‐Sen Jiang, K.T. Huang, Sheng‐Han Yi, Chin-I Wang, Teng-Jan Chang, Wei-Chung Kao, Chunyuan Wang, Yu‐Tung Yin, Jay Shieh, Miin‐Jang Chen
Topics & Concepts
Materials scienceFerroelectricityOptoelectronicsCapacitorBilayerFerroelectric capacitorField-effect transistorNon-volatile memorySemiconductorSiliconTransistorFerroelectric RAMThin filmNanotechnologyDielectricVoltageElectrical engineeringEngineeringBiologyMembraneGeneticsFerroelectric and Negative Capacitance DevicesSemiconductor materials and devicesFerroelectric and Piezoelectric Materials