Mass Produced Micromachined Ultrasonic Time-Of-Flight Sensors Operating in Different Frequency Bands
Richard J. Przybyla, Stefon E. Shelton, Cathy Lee, Benjamin E. Eovino, Quy Chau, Mitchell Kline, Oleg Izyumin, David A. Horsley
Abstract
This paper presents a new family of ultrasonic time-of-flight (ToF) sensors, which each incorporate AlN piezoelectric micromachined ultrasonic transducers operating at 175 kHz, 85 kHz, and 50 kHz. The work includes a theoretical model for the PMUT and the sensor's maximum range.
Topics & Concepts
Ultrasonic sensorPMUTTime of flightAcousticsCapacitive micromachined ultrasonic transducersPiezoelectricityMaterials scienceTransducerSurface micromachiningRangingEngineeringFabricationPhysicsOpticsTelecommunicationsPathologyAlternative medicineMedicineFlow Measurement and AnalysisAcoustic Wave Resonator TechnologiesAdvanced MEMS and NEMS Technologies