Interface tuning and electrical property optimization of La-doped ZrO2 gate dielectric based on solution driving
Haotian Cai, Kamale Tuokedaerhan, Zhenchuan Lu, Renjia Zhang, Hongguo Du
Topics & Concepts
Materials scienceDopingDielectricOptoelectronicsGate dielectricLeakage (economics)High-κ dielectricBand gapCrystallizationThin filmElectronic engineeringNanotechnologyVoltageElectrical engineeringChemical engineeringTransistorEconomicsMacroeconomicsEngineeringSemiconductor materials and devicesAdvanced Memory and Neural ComputingFerroelectric and Negative Capacitance Devices