Low-oxygen silicon preparation using vacuum treatment by oxidation control and moisture removal kinetics investigation
Shifeng Han, Shicong Yang, Kuixian Wei, Wenhui Ma, Jianqiang Zhang
Topics & Concepts
SiliconWaferMoistureMaterials scienceOxygenChemical engineeringDiffusionLayer (electronics)EvaporationActivation energyAnalytical Chemistry (journal)ChemistryComposite materialNanotechnologyMetallurgyChromatographyOrganic chemistryPhysicsEngineeringThermodynamicsSilicon and Solar Cell TechnologiesPhotovoltaic Systems and SustainabilityRecycling and Waste Management Techniques