A native oxide high-κ gate dielectric for two-dimensional electronics
Tianran Li, Teng Tu, Yuanwei Sun, Huixia Fu, Yu Jia, Lei Xing, Ziang Wang, Huimin Wang, Rundong Jia, Jinxiong Wu, Congwei Tan, Yan Liang, Yichi Zhang, Congcong Zhang, Yumin Dai, Chenguang Qiu, Ming Li, Ru Huang, Liying Jiao, Keji Lai, Binghai Yan, Peng Gao, Hailin Peng
Topics & Concepts
Materials scienceDielectricOptoelectronicsGate dielectricSemiconductorSiliconHigh-κ dielectricTransistorMicroelectronicsGate oxideField-effect transistorEquivalent oxide thicknessNanotechnologyOxideElectrical engineeringVoltageMetallurgyEngineering2D Materials and ApplicationsGraphene research and applicationsElectronic and Structural Properties of Oxides