High-performance chemical mechanical polishing slurry for aluminum alloy using hybrid abrasives of zirconium phosphate and alumina
Li Tao, Haoyang Sun, Daiqi Wang, Jintao Huang, Dandan Li, Fan Lei, Dazhi Sun
Topics & Concepts
Chemical-mechanical planarizationMaterials scienceSlurryAlloyDispersantX-ray photoelectron spectroscopyChemical engineeringCubic zirconiaZirconiumPolishingCoatingMetallurgyComposite materialDispersion (optics)CeramicOpticsEngineeringPhysicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics