Residual stresses and tribomechanical behaviour of TiAlN and TiAlCN monolayer and multilayer coatings by DCMS and HiPIMS
Wolfgang Tillmann, Diego Grisales, Dominic Stangier, Carl Arne Thomann, J. Debus, Alexander Nienhaus, Daniel Apel
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceResidual stressDiffractometerComposite materialCoatingSputter depositionMetallurgySputteringThin filmScanning electron microscopeNanotechnologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research