Investigation of damage generation process by stress waves during femtosecond laser drilling of SiC
Junya Hattori, Yusuke Ito, Keisuke Nagato, Naohiko Sugita
Topics & Concepts
FemtosecondMaterials scienceLaserSilicon carbideLaser drillingSurface micromachiningStress waveOpticsOptoelectronicsStress (linguistics)CarbideDrillingComposite materialMetallurgyFabricationLinguisticsPhysicsPhilosophyAlternative medicinePathologyMedicineLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure Analysis