Fabrication and embedded sensors characterization of a micromachined water-propellant vaporizing liquid microthruster
Donato Fontanarosa, Chiara De Pascali, Maria Grazia De Giorgi, Pietro Siciliano, Antonio Ficarella, Luca Francioso
Topics & Concepts
Materials scienceFabricationPropellantMiniaturizationWaferDeep reactive-ion etchingMicrofabricationNanotechnologySurface micromachiningResistive touchscreenOptoelectronicsMechanical engineeringElectrical engineeringAerospace engineeringEtching (microfabrication)Reactive-ion etchingEngineeringPathologyMedicineLayer (electronics)Alternative medicineElectrohydrodynamics and Fluid DynamicsPlasma Diagnostics and ApplicationsGas Sensing Nanomaterials and Sensors