Characterization of structural and mechanical properties of DLC films deposited on the surface of minute-scale 3D objects: Comparison of PECVD and FCVA deposition technique
Yuki Hirata, Kotaro Kawai, Toyohiro Kato, Hayata Fujimoto, Yuto Tameno, Takumi Ishikawa, Hiroshige MATSUOKA, Hiroki Akasaka, Naoto Ohtake
Topics & Concepts
Materials sciencePlasma-enhanced chemical vapor depositionDiamond-like carbonAmorphous carbonNanoindentationCarbon filmComposite materialMicrostructureRaman spectroscopyCoatingChemical vapor depositionAmorphous solidCarbon fibersThin filmNanotechnologyComposite numberOpticsCrystallographyChemistryPhysicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsCarbon Nanotubes in Composites