Effect of temperature on the growth of TiN thin films by oblique angle sputter-deposition: A three-dimensional atomistic computational study
Rubenson Mareus, Cédric Mastail, Florin Nita, A. Michel, G. Abadias
Topics & Concepts
Materials scienceSputter depositionSputteringSubstrate (aquarium)Thin filmTinDeposition (geology)Particle (ecology)Tilt (camera)OpticsAnisotropySurface roughnessMolecular physicsGeometryComposite materialChemistryNanotechnologyPhysicsMetallurgyOceanographyMathematicsSedimentBiologyGeologyPaleontologyMetal and Thin Film MechanicsOptical Coatings and GratingsHigh-Temperature Coating Behaviors