Modulation of carrier density in indium–gallium–zinc-oxide thin film prepared by high-power impulse magnetron sputtering
Ming-Jie Zhao, Zuo-Zhu Chen, Chun-Yan Shi, Qi-Zhen Chen, Miao Xu, Wan-Yu Wu, Dong-Sing Wuu, Shui‐Yang Lien, Wen‐Zhang Zhu
Topics & Concepts
GalliumMaterials scienceSputteringSputter depositionZincAmorphous solidIndiumThin filmHigh-power impulse magnetron sputteringAnalytical Chemistry (journal)Electron mobilityOxygenOptoelectronicsChemistryMetallurgyNanotechnologyCrystallographyOrganic chemistryChromatographyThin-Film Transistor TechnologiesZnO doping and propertiesTransition Metal Oxide Nanomaterials