Thermal atomic layer etching of CoO using acetylacetone and ozone: Evidence for changes in oxidation state and crystal structure during sequential exposures
Jonathan L. Partridge, А. И. Абдулагатов, Varun Sharma, Jessica A. Murdzek, Andrew S. Cavanagh, Steven M. George
Topics & Concepts
AcetylacetoneX-ray photoelectron spectroscopyMaterials scienceAnalytical Chemistry (journal)Thermal oxidationSingle crystalOxidation stateChemistryCrystallographyInorganic chemistryLayer (electronics)MetalChemical engineeringOrganic chemistryNanotechnologyEngineeringMetallurgySemiconductor materials and devicesZnO doping and propertiesPlasma Diagnostics and Applications