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Broadband MSM photodetector based on S-doped black silicon fabricated by femtosecond laser

Xiaona Zhao, Kun Lin, Bing Zhao, Wenhan Du, Jijil JJ Nivas, S. Amoruso, Xuan Wang

2023Applied Surface Science23 citationsDOI

Topics & Concepts

Materials scienceBlack siliconOptoelectronicsSiliconDopingFemtosecondPhotodetectorLaserInfraredBand gapAbsorptanceSemiconductorOpticsReflectivityPhysicsSilicon Nanostructures and PhotoluminescenceThin-Film Transistor TechnologiesNanowire Synthesis and Applications
Broadband MSM photodetector based on S-doped black silicon fabricated by femtosecond laser | Litcius