Angular phase-shifting interferometry for surface shapes measurement using vortex beam
Dong Yang, Yanfeng Zhang, Zhongming Yang, Zhongming Yang
Topics & Concepts
DemodulationInterferometryOpticsPhase (matter)Surface (topology)Surface metrologyConformal mapPhysicsVortexProfilometerOptical pathMaterials scienceGeometryComputer scienceTelecommunicationsMathematicsThermodynamicsQuantum mechanicsChannel (broadcasting)Surface roughnessOptical measurement and interference techniquesDigital Holography and MicroscopySurface Roughness and Optical Measurements