Litcius/Paper detail

Monolithic and heterogeneous three-dimensional integration of two-dimensional materials with high-density vias

Subir Ghosh, Yikai Zheng, Zhiyu Zhang, Yongwen Sun, Thomas F. Schranghamer, Najam U Sakib, Aaryan Oberoi, Chen Chen, Joan M. Redwing, Yang Yang, Saptarshi Das

2024Nature Electronics66 citationsDOI

Topics & Concepts

Materials scienceEngineering physicsEngineeringGraphene research and applications2D Materials and ApplicationsAdvanced Memory and Neural Computing