The effect of microstructure and film composition on the mechanical properties of linear antenna CVD diamond thin films
Rani Mary Joy, Paulius Pobedinskas, Nina Baule, Shengyuan Bai, Daen Jannis, Nicolas Gauquelin, M.A. Pinault-Thaury, François Jomard, Kamatchi Jothiramalingam Sankaran, Rozita Rouzbahani, Fernando Lloret, Derese Desta, Jan D’Haen, Johan Verbeeck, Michael Becker, Ken Haenen
Topics & Concepts
Materials scienceChemical vapor depositionDiamondThin filmMicrostructureComposite materialCarbon filmWaferResidual stressUltimate tensile strengthGrain sizeYoung's modulusStress (linguistics)NanotechnologyPhilosophyLinguisticsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced Surface Polishing Techniques