Design of ciliated MEMS vector hydrophone based on stainless steel mesh cap
Chen Peng, Guojun Zhang, Ting Lv, Xiaoqi Liang, Xi Yang, Songxiang Ji, Weirong Ren, Yanan Geng, Shan Zhu, Renxin Wang, Wendong Zhang
Topics & Concepts
HydrophoneMaterials scienceMicroelectromechanical systemsAcousticsBandwidth (computing)PerforationComposite materialPolyurethaneOptoelectronicsComputer scienceTelecommunicationsPhysicsPunchingAdvanced MEMS and NEMS TechnologiesOptical measurement and interference techniquesAdvanced Fiber Optic Sensors