Effect of capping layer on the ferroelectricity of hafnium oxide
Jui-Hsuan Chang, Chen-Gui Zheng, Hsuan-Han Chen, Pei-Tien Chen, Cun-Bo Liu, Kai-Yang Huang, Hsiao‐Hsuan Hsu, Chun‐Hu Cheng, Wu‐Ching Chou, Su‐Ting Han
Topics & Concepts
FerroelectricityMaterials scienceNitrideAnnealing (glass)OptoelectronicsCapacitorOxideElectrodeStress (linguistics)DopantLayer (electronics)Composite materialDielectricDopingMetallurgyVoltageElectrical engineeringChemistryPhilosophyLinguisticsPhysical chemistryEngineeringFerroelectric and Negative Capacitance DevicesSemiconductor materials and devicesMXene and MAX Phase Materials