Nanostructure distortion improvement of Al doped spinel LiMn2O4 films deposited by RF magnetron sputtering for flexible high-voltage lithium ion batteries
Hsi-Chao Chen, Der‐Jun Jan, Bo-Chun Lin, Tien-Hsiang Hsueh
Topics & Concepts
Materials scienceSpinelSputter depositionHigh-power impulse magnetron sputteringCavity magnetronDopingAnnealing (glass)OptoelectronicsLithium (medication)SputteringAnalytical Chemistry (journal)Thin filmNanotechnologyMetallurgyChemistryEndocrinologyMedicineChromatographyAdvancements in Battery MaterialsSemiconductor materials and devicesElectromagnetic wave absorption materials