Review on high efficiency and high precision compliant polishing method
Huiming Feng, Linbin Huang, Peizhi Huang, Jia‐Ming Liu, Xiangbo He, Yunfeng Peng
Topics & Concepts
PolishingComputer scienceMaterials scienceEngineering drawingEngineeringMechanical engineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationIntegrated Circuits and Semiconductor Failure Analysis