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Stealth dicing of sapphire sheets with low surface roughness, zero kerf width, debris/crack-free and zero taper using a femtosecond Bessel beam

Zhaoqing Li, Xuefeng Wang, Junlong Wang, Olivier Allegre, Wei Guo, Wenyan Gao, Nan Jia, Lin Li

2020Optics & Laser Technology32 citationsDOI

Topics & Concepts

Bessel beamMaterials scienceOpticsAxiconSurface roughnessSapphireLaser beam machiningFemtosecondMachiningSurface finishBeam (structure)Wafer dicingLaserBessel functionComposite materialLaser beamsPhysicsMetallurgyLayer (electronics)Laser Material Processing TechniquesLaser-induced spectroscopy and plasmaAdhesion, Friction, and Surface Interactions
Stealth dicing of sapphire sheets with low surface roughness, zero kerf width, debris/crack-free and zero taper using a femtosecond Bessel beam | Litcius