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Optical bandgap control in Al2O3/TiO2 heterostructures by plasma enhanced atomic layer deposition: Toward quantizing structures and tailored binary oxides

Pallabi Paul, Md. Golam Hafiz, P. Schmitt, Christian Patzig, Félix Otto, Torsten Fritz, Andreas Tünnermann, Adriana Szeghalmi

2021Spectrochimica Acta Part A Molecular and Biomolecular Spectroscopy23 citationsDOI

Topics & Concepts

Atomic layer depositionHeterojunctionMaterials scienceBand gapOptoelectronicsX-ray photoelectron spectroscopyRefractive indexThin filmEllipsometryOpticsNanotechnologyChemical engineeringPhysicsEngineeringSemiconductor materials and devicesZnO doping and propertiesElectronic and Structural Properties of Oxides
Optical bandgap control in Al2O3/TiO2 heterostructures by plasma enhanced atomic layer deposition: Toward quantizing structures and tailored binary oxides | Litcius