Highly hydrophobic metal–organic framework for self-protecting gate dielectrics
Arif I. Inamdar, Abhishek Pathak, Muhammad Usman, Kuan‐Ru Chiou, Pei-Hsien Tsai, Shruti Mendiratta, Saqib Kamal, Yen‐Hsiang Liu, J.W. Chen, Ming‐Hsi Chiang, Kuang‐Lieh Lu
Abstract
A high-<italic>κ</italic>copper-based metal–organic framework with unusual dielectric behaviour and outstanding water resistant properties was successfully designed for self-protecting microelectronic devices as gate dielectrics.
Topics & Concepts
MicroelectronicsDielectricMaterials scienceGate dielectricHigh-κ dielectricCopperMetalNanotechnologyOptoelectronicsTransistorElectrical engineeringMetallurgyEngineeringVoltageMetal-Organic Frameworks: Synthesis and ApplicationsSemiconductor materials and devicesMXene and MAX Phase Materials