Semi-automatic wafer map pattern classification with convolutional neural networks
Suhee Yoon, Seokho Kang
Topics & Concepts
Convolutional neural networkWaferComputer scienceArtificial intelligenceProcess (computing)Artificial neural networkPattern recognition (psychology)Semiconductor device fabricationInferenceDeep learningMachine learningEngineeringElectrical engineeringOperating systemIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques