Structural and tribological properties of TiSiN films with different Si content
Hikmet Çiçek, Yunus Emre Acar, Semih Duran, Ahmet Melik Yılmaz, Muhammet Cakir
Topics & Concepts
Materials scienceTribologyScanning electron microscopeAnalytical Chemistry (journal)Surface roughnessThin filmDiffractionSputteringSputter depositionComposite materialNanotechnologyChemistryOpticsPhysicsChromatographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materials