A resonant pressure MEMS sensor based on levitation force excitation detection
Mohammadreza Zamanzadeh, Ilgar Jafarsadeghi-Pournaki, Hassen M. Ouakad
Topics & Concepts
LevitationCapacitive sensingBifurcationAmplitudeAcousticsMicroelectromechanical systemsFinite element methodStability (learning theory)MechanicsControl theory (sociology)SimulationComputer sciencePhysicsEngineeringStructural engineeringMechanical engineeringElectrical engineeringOpticsMagnetNonlinear systemOptoelectronicsArtificial intelligenceQuantum mechanicsMachine learningControl (management)Advanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies