Mist CVD technology for gallium oxide deposition: A review
Suhao Yao, Yifan Yao, Maolin Zhang, Xueqiang Ji, Shan Li, Weihua Tang
Topics & Concepts
Materials scienceGalliumMistGallium oxideChemical vapor depositionDeposition (geology)Engineering physicsNanotechnologyMetallurgyChemical engineeringMeteorologyEngineeringPhysicsSedimentBiologyPaleontologyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques