Deformation behaviors and inverse Hall-Petch effect in nanoindentation of silicon: An atomistic simulation study with experimental validation
Yachao Wang, Md. Akram Minhaj, Xinnan Wang, Jing Shi
Topics & Concepts
NanoindentationMonocrystalline siliconMaterials scienceIndentationSiliconPolycrystalline siliconGrain sizeCrystalliteGrain boundaryNanocrystalline siliconComposite materialCrystallographyMetallurgyCrystalline siliconMicrostructureAmorphous siliconChemistryThin-film transistorLayer (electronics)Metal and Thin Film MechanicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials Research