Study of defects distribution in SiO2/SiC with plasma oxidation and post oxidation annealing
Qian Zhang, Nannan You, Peng Liu, Jiayi Wang, Yang Xu, Shengkai Wang
Topics & Concepts
Annealing (glass)PlasmaMaterials scienceChemical engineeringMetallurgyNuclear physicsPhysicsEngineeringSilicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesIntegrated Circuits and Semiconductor Failure Analysis