Atomic layer deposition supercycle approach applied to the Al-doping of nearly saturated ZnO surfaces
Obed Yamín Ramírez‐Esquivel, Dalia Alejandra Mazón‐Montijo, D. Cabrera‐German, E. Martı́nez, Z. Montiel‐González
Topics & Concepts
DopantMaterials scienceAtomic layer depositionDopingNanotechnologyMicroelectronicsTransparent conducting filmDeposition (geology)Layer (electronics)IndiumOptoelectronicsBiologySedimentPaleontologyZnO doping and propertiesSemiconductor materials and devicesElectronic and Structural Properties of Oxides