Thermal mismatch engineering induced freestanding and ultrathin Ga2O3 membrane for vertical electronics
Yi Lu, Xuecui Zou, Shibin Krishna, Xiao Tang, Zhiyuan Liu, Mingtao Nong, Che‐Hao Liao, Saravanan Yuvaraja, Mohamed Ben Hassine, Hossein Fariborzi, Xiaohang Li
Topics & Concepts
Materials scienceExfoliation jointOptoelectronicsElectronicsSubstrate (aquarium)ResponsivityFlexible electronicsEpitaxyLayer (electronics)Strain engineeringThermal expansionNanotechnologyMembranePhotodetectorComposite materialElectrical engineeringSiliconGrapheneGeologyEngineeringGeneticsBiologyOceanographyGa2O3 and related materialsZnO doping and propertiesGaN-based semiconductor devices and materials