Bioinspired micro-electromechanical systems/nano-electromechanical systems: an overview, applications, and perspective
Vinayak Pachkawade
Topics & Concepts
Perspective (graphical)Nano-NanotechnologyMaterials scienceEngineeringSystems engineeringComputer scienceArtificial intelligenceComposite materialMechanical and Optical ResonatorsForce Microscopy Techniques and ApplicationsNanofabrication and Lithography Techniques