In-situ and ex-situ face-to-face annealing of epitaxial AlN
Merve Nur Koçak, Kağan Murat Pürlü, İzel Perkitel, İsmail Altuntaş, İlkay Demir
Topics & Concepts
Annealing (glass)Materials scienceSapphireNucleationEpitaxyIn situRaman spectroscopyMetalorganic vapour phase epitaxyAnalytical Chemistry (journal)CrystallographyOptoelectronicsLayer (electronics)NanotechnologyChemistryOpticsComposite materialLaserOrganic chemistryChromatographyPhysicsGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsAcoustic Wave Resonator Technologies