A vertically integrated ZnO-based hydrogen sensor with hierarchical bi-layered inverse opals
Pei-Sung Hung, Yu-Szu Chou, Bo‐Han Huang, I-Kai Cheng, Guang-Ren Wang, Wei-An Chung, Fu‐Ming Pan, Pu‐Wei Wu
Topics & Concepts
Materials scienceInverseNanoporousX-ray photoelectron spectroscopyMesoporous materialNanotechnologyOxideAtomic layer depositionChemical engineeringOptoelectronicsLayer (electronics)ChemistryCatalysisGeometryMetallurgyEngineeringMathematicsBiochemistryGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesPolydiacetylene-based materials and applications