Synergistic effects of Ga doping and Mg alloying over the enhancement of the stress sensitivity of a Ga-doped MgZnO pressure sensor
Ping Han Lee, Sanjaya Brahma, Jit Dutta, Jow‐Lay Huang, Chuan‐Pu Liu
Abstract
We demonstrate the synergistic effects of Ga doping and Mg alloying into ZnO on the large enhancement of the piezopotential and stress sensing performance of piezotronic pressure sensors made of Ga-doped MgZnO films.
Topics & Concepts
DopingMaterials scienceStress (linguistics)OptoelectronicsSensitivity (control systems)Electronic engineeringLinguisticsEngineeringPhilosophyZnO doping and propertiesGas Sensing Nanomaterials and SensorsAcoustic Wave Resonator Technologies