Deformation-adaptive pressure sensors based on multi-level discrete sensing arrays for morphing electronics and human–machine interaction
Changjiang Li, Jie Zhang, Haocheng Yu, Fengwan Zhao, Zhe Xu, Xiren Wei, Hao Wang, Xiaoming Chen, Zuo‐Guang Ye, Xiaohui Zhang, Ming Liu
Abstract
Stretchable pressure sensors are essential for intelligent machine perception and human-machine interactions, yet their accuracy is often compromised by deformation, due to limited strain tolerance of continuous-structure sensing materials. To resolve this issue, we propose a multi-level discrete array strategy to fabricate superior deformation-adaptive sensors. Then, an innovative and eco-friendly approach is developed to fabricate micro-nano hierarchical ZnO arrays through combined plasma-enhanced atomic layer deposition and hydrothermal growth. The micro-scale pattern acts as first-level discrete structure, enabling high stretchability of sensor, while ZnO nanorods function as the secondary structure to dissipate interfacial shear stress. This multi-level design ensures 98.2% strain insensitivity even under 100% strain, and the sensor exhibits a 1 Pa detection limit and dynamic monitoring capability during dynamic deformation, validating its potential in morphing electronics. Notably, this approach can create a sensing array with different sensitivities by adjusting the ZnO area ratios. The resulting E-skin serves as a human–machine interface for controlling robotic hand movements, which requires only a single pair of electrodes and doesn’t need external power source.