Epitaxial indium tin oxide films deposited on yttrium stabilized zirconia substrate by DC magnetron sputtering
Gaige Huang, Qiaonan Yu, Shiwen Kou, Pengwei Zhai, Guoqiang Li
Topics & Concepts
Materials scienceYttria-stabilized zirconiaCubic zirconiaYttriumEpitaxySputter depositionSubstrate (aquarium)Indium tin oxideSputteringOptoelectronicsCavity magnetronThin filmMetallurgyOxideComposite materialNanotechnologyCeramicLayer (electronics)OceanographyGeologyZnO doping and propertiesGas Sensing Nanomaterials and SensorsThin-Film Transistor Technologies