0.02 °/h, 0.004°/√h, 6.3-mA NEMS Gyroscope With Integrated Circuit
Andrea Buffoli, Marco Gadola, Marc Sansa, Giacomo Langfelder
Abstract
This work introduces a system formed by an integrated circuit (IC) and a micromachined piezoresistive gyroscope, with navigation grade performance. After discussing the specifications in terms of maximum allowed electronic noise, so not to worsen the thermomechanical noise limits, three different front-end topologies are analyzed, and the current-feedback instrumentation amplifier (CFIA) is chosen as the optimal solution in terms of noise and current consumption. After coupling to a gyroscope based on nanogauges, the system demonstrates 200-dps full scale, <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$0.02~ {\mathrm { ^{\circ}}}/ {\mathrm { \text {h}}}$ </tex-math></inline-formula> stability, and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$0.004~ {\mathrm { ^{\circ}}}/\sqrt { {\mathrm { \text {h}}}}$ </tex-math></inline-formula> angle random walk, confirming navigation-grade performance at a current consumption well below 10 mA and an overall power consumption below 40 mW.