Close atomic surface of titanium alloy produced by novel photocatalytic chemical mechanical polishing using developed SiO2@Al2O3@CeO2 composite abrasives with high material removal rate
Shuai Zhang, Dong Wang, Feng Zhao, Zhenyu Zhang, Hongxiu Zhou, Leilei Chen, Lijia Yan, Baoshan Zhao
Topics & Concepts
PolishingMaterials sciencePhotocatalysisComposite numberChemical-mechanical planarizationAlloyTitaniumMetallurgyTitanium alloyComposite materialChemistryCatalysisBiochemistryDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesAdvanced materials and composites